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Easy to operate and install
 
High reliability and maintainability
 
Have warning and alarm record
 
Have temp. trend record (seven days data)
 
No coolant leak concern during PM or power off (close loop design)
 
Auto recovery remote set point temp. when the line of remote set point disconnect with chiller
 
N2 purge function option during PM and no impact with other chamber
 
For variety processes in semiconductor and LCD…industry
 
PLC control (no power drop issue. etc.)
 
No leak pump and inverter control
 
Energy save design-real time hot gas design
 
Two temperature sensor and three control methods which can change chiller performance to suit different process using
 
CMS function option
 
 
 
24 hours on call service.- service hotline: 0916-088709 0968-667440
 
  Chilltech Corporation │Tel: 886-3-553-0986 │Fax: 886-3-553-1031  
Hsinchu Company :No.730, Bo-ai St., Jhubei City, Hsinchu County 302, Taiwan (R.O.C.)
 

Tainan Office:No.256, Zihyou Rd., Shanhua Township, Tainan County 741, Taiwan (R.O.C.)