Product Advantages

• Easy to operate and install
• High reliability and maintainability
• Have warning and alarm record
• Have temp. trend record (seven days data)
• No coolant leak concern during PM or power off (close loop design)
• Auto recovery remote set point temp. when the line of remote set point disconnect with chiller
• N2 purge function option during PM and no impact with other chamber
• For variety processes in semiconductor and LCD…industry
• PLC control (no power drop issue. etc.)
• No leak pump and inverter control
• Energy save design-real time hot gas design
• Two temperature sensor and three control methods which can change chiller performance to suit different process using
• CMS function option