Product Advantages

  • Easy to operate and install
  • High reliability and maintainability
  • Have warning and alarm record
  • Have temp. trend record (seven days data)
  • No coolant leak concern during PM or power off (close loop design)
  • Auto recovery remote set point temp. when the line of remote set point disconnect with chiller
  • N2 purge function option during PM and no impact with other chamber
  • For variety processes in semiconductor and LCD…industry
  • PLC control (no power drop issue. etc.)
  • No leak pump and inverter control
  • Energy save design-real time hot gas design
  • Two temperature sensor and three control methods which can change chiller performance to suit different process using
  • CMS function option

Chilltech Corporation

Service hotline:0916-088709

  • Address:Hsinchu Company :No. 15, Ln. 288, Xipu Rd., East Dist., Hsinchu City 300001 , Taiwan (ROC)
  • Tel:03-5530986
  • Fax:03-5531031
  • Tainan Office:No.256, Zihyou Rd., Shanhua Township, Tainan County 741, Taiwan (R.O.C.)